Keyphrases
Micro-electro-mechanical Systems
100%
System Structure
100%
Polysilicon
100%
First Passage
100%
Probabilistic Fracture
100%
Size Effect
37%
Strength Distribution
37%
Sidewall
25%
Stress Field
25%
Random Stress
25%
Statistical Model
12%
Monte Carlo Simulation
12%
Structural Strength
12%
Guard
12%
Device Design
12%
Random Field
12%
Failure Criterion
12%
Three-point Bending
12%
Power Law
12%
Probabilistic Model
12%
Non-stationary Stochastic Process
12%
Strength of Materials
12%
Failure Load
12%
Physical Interpretation
12%
Fracture Initiation
12%
Weakest Link Model
12%
Finite Element Simulation
12%
Strength Statistics
12%
Loading Configuration
12%
Failure Risk
12%
Material Tensile Strength
12%
Uniaxial Tensile
12%
Gauge Length
12%
Random Material
12%
Stochastic Finite Element
12%
Material Length Scale
12%
Simulation-based
12%
Weakest Link
12%
Engineering
Microelectromechanical System
100%
System Structure
100%
Polysilicon
100%
Strength Distribution
37%
Size Effect
37%
Side Wall
25%
Stress Field
25%
Failure Criterion
12%
Point Bending
12%
Length Scale
12%
Tensiles
12%
Random Field
12%
Failure Load
12%
Structural Strength
12%
Paramount Importance
12%
Finite Element Simulation
12%
Ultimate Tensile Strength
12%
Gauge Length
12%
Measured Strength
12%
Fracture Initiation
12%
Statistical Model
12%