A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates

Rebecca L. Peterson; Rhonda F. Drayton

doi:10.1109/ARFTG.2001.327463

A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates

Rebecca L. Peterson
, Rhonda F. Drayton

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW "T" is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.

Original language	English (US)
Title of host publication	57th ARFTG Conference Digest Spring 2001
Subtitle of host publication	Best Practices and Strategies for RF Test, ARFTG Spring 2001
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	0780356861, 9780780356863
DOIs	https://doi.org/10.1109/ARFTG.2001.327463
State	Published - 2001
Event	57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 - Phoenix, United States Duration: May 25 2001 → …

Publication series

Name	57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001

Other

Other	57th Automatic RF Techniques Group Conference, ARFTG Spring 2001
Country/Territory	United States
City	Phoenix
Period	5/25/01 → …

Bibliographical note

Funding Information:
The authors thank Daniel Amey of DuPont for his support and assistance. This work has been supported by an Automatic RF Techniques Group (ARFTG) Microwave Measurement Student Fellowship, a National Science Foundation Graduate Fellowship, and a Dupont Educational Aid Grant.

Publisher Copyright:
© 2001 IEEE.

Publisher link

10.1109/ARFTG.2001.327463

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Peterson, R. L., & Drayton, R. F. (2001). A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates. In 57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001 Article 4120164 (57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ARFTG.2001.327463

A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates. / Peterson, Rebecca L.; Drayton, Rhonda F.
57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001. Institute of Electrical and Electronics Engineers Inc., 2001. 4120164 (57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Peterson, RL & Drayton, RF 2001, A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates. in 57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001., 4120164, 57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001, Institute of Electrical and Electronics Engineers Inc., 57th Automatic RF Techniques Group Conference, ARFTG Spring 2001, Phoenix, United States, 5/25/01. https://doi.org/10.1109/ARFTG.2001.327463

Peterson RL, Drayton RF. A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates. In 57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001. Institute of Electrical and Electronics Engineers Inc. 2001. 4120164. (57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001). doi: 10.1109/ARFTG.2001.327463

Peterson, Rebecca L. ; Drayton, Rhonda F. / A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates. 57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001. Institute of Electrical and Electronics Engineers Inc., 2001. (57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001).

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title = "A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates",

abstract = "The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW {"}T{"} is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.",

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note = "Funding Information: The authors thank Daniel Amey of DuPont for his support and assistance. This work has been supported by an Automatic RF Techniques Group (ARFTG) Microwave Measurement Student Fellowship, a National Science Foundation Graduate Fellowship, and a Dupont Educational Aid Grant. Publisher Copyright: {\textcopyright} 2001 IEEE.; 57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 ; Conference date: 25-05-2001",

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N2 - The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW "T" is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.

AB - The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW "T" is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.

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A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates

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