@inproceedings{e1d4a336899e462ca338ce2e96ed6196,
title = "A CPW T-Resonator Technique for Electrical Characterization of Microwave Substrates",
abstract = "The microstrip T-resonator is a well established tool for determining broadband electrical properties of microwave materials, namely effective dielectric constant and attenuation. In this paper finite ground coplanar waveguide (CPW) T-resonators on high resistivity silicon are presented and evaluated. The multi-moding seen in CPW T-junctions is effectively eliminated through the use of gold wire bonds. The calibration independence of the CPW T-resonator technique is demonstrated and the predicted impedance independence of the CPW {"}T{"} is experimentally validated. The electrical property results obtained using the T-resonator on high resistivity silicon substrates are in good agreement with data from other characterization techniques. The CPW T-resonator is thus shown to provide rapid and accurate characterization of integrated microwave substrates.",
author = "Peterson, {Rebecca L.} and Franklin, {Rhonda R}",
year = "2001",
month = jan,
day = "1",
doi = "10.1109/ARFTG.2001.327463",
language = "English (US)",
series = "57th ARFTG Conference Digest Spring 2001: Best Practices and Strategies for RF Test, ARFTG Spring 2001",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "57th ARFTG Conference Digest Spring 2001",
note = "57th Automatic RF Techniques Group Conference, ARFTG Spring 2001 ; Conference date: 25-05-2001",
}