A CPW T-resonator technique for electrical characterization of microwave substrates

Rebecca Lorenz Peterson, Rhonda Franklin Drayton

Research output: Contribution to journalArticle

32 Scopus citations


An impedance independent method is proposed using a finite ground coplanar waveguide (CPW) T-resonator to electrically characterize microwave materials. Silicon-based CPW T-resonators are designed and measured, with calibrated data agreeing well with other methods up to 30 GHz. Uncalibrated measurements produce dielectric constant and attenuation results within 3.7% and 25%, respectively, of those obtained with calibration. Hence, the CPW T-resonator can be used to provide rapid and accurate characterization of microwave substrates with unknown dielectric properties.

Original languageEnglish (US)
Pages (from-to)90-92
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number3
StatePublished - Mar 1 2002


  • Coplanar waveguide
  • Dielectric constant
  • Resonators
  • Semiconductor material measurements

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