An impedance independent method is proposed using a finite ground coplanar waveguide (CPW) T-resonator to electrically characterize microwave materials. Silicon-based CPW T-resonators are designed and measured, with calibrated data agreeing well with other methods up to 30 GHz. Uncalibrated measurements produce dielectric constant and attenuation results within 3.7% and 25%, respectively, of those obtained with calibration. Hence, the CPW T-resonator can be used to provide rapid and accurate characterization of microwave substrates with unknown dielectric properties.
- Coplanar waveguide
- Dielectric constant
- Semiconductor material measurements