A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films

M. W. Jang, M. Lu, T. Cui, S. A. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


MEMS or NEMS devices have been studied as a candidate to substitute for CMOS devices because of their ability to have off-state currents much less than 1 pA [1]. This is a particularly compelling attribute when one compares them to deeply scaled CMOS. However, MEMS devices have not shown high speed switching capability [2]. Indeed, there is an inherent tradeoff in cantilever design between frequency of operation and pull-in voltage. Thus, there have been no reports of switching a fabricated cantilever at speeds less than 1 μsec with pull-in voltages of a few volts or less. A careful investigation of the device parameters governing cantilever operation suggests that the way to make high speed devices with low pull-in voltages is to use extremely small gaps and light weight materials. Therefore cantilevers were made from an aligned composite single wall carbon nanotube membrane was prepared by a dielectrophoretic self-assembly process (AC-SWNT). The process, as detailed in our recent report [3] uses alternating layers of aligned carbon nanotubes and polymer. The fixedbeam switch consists of a gate electrode and a 20 nm thick AC-SWNT membrane suspended between two electrodes.

Original languageEnglish (US)
Title of host publication67th Device Research Conference, DRC 2009
Number of pages2
StatePublished - Dec 11 2009
Event67th Device Research Conference, DRC 2009 - University Park, PA, United States
Duration: Jun 22 2009Jun 24 2009

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770


Other67th Device Research Conference, DRC 2009
Country/TerritoryUnited States
CityUniversity Park, PA


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