TY - GEN
T1 - A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films
AU - Jang, M. W.
AU - Lu, M.
AU - Cui, T.
AU - Campbell, S. A.
PY - 2009/12/11
Y1 - 2009/12/11
N2 - MEMS or NEMS devices have been studied as a candidate to substitute for CMOS devices because of their ability to have off-state currents much less than 1 pA [1]. This is a particularly compelling attribute when one compares them to deeply scaled CMOS. However, MEMS devices have not shown high speed switching capability [2]. Indeed, there is an inherent tradeoff in cantilever design between frequency of operation and pull-in voltage. Thus, there have been no reports of switching a fabricated cantilever at speeds less than 1 μsec with pull-in voltages of a few volts or less. A careful investigation of the device parameters governing cantilever operation suggests that the way to make high speed devices with low pull-in voltages is to use extremely small gaps and light weight materials. Therefore cantilevers were made from an aligned composite single wall carbon nanotube membrane was prepared by a dielectrophoretic self-assembly process (AC-SWNT). The process, as detailed in our recent report [3] uses alternating layers of aligned carbon nanotubes and polymer. The fixedbeam switch consists of a gate electrode and a 20 nm thick AC-SWNT membrane suspended between two electrodes.
AB - MEMS or NEMS devices have been studied as a candidate to substitute for CMOS devices because of their ability to have off-state currents much less than 1 pA [1]. This is a particularly compelling attribute when one compares them to deeply scaled CMOS. However, MEMS devices have not shown high speed switching capability [2]. Indeed, there is an inherent tradeoff in cantilever design between frequency of operation and pull-in voltage. Thus, there have been no reports of switching a fabricated cantilever at speeds less than 1 μsec with pull-in voltages of a few volts or less. A careful investigation of the device parameters governing cantilever operation suggests that the way to make high speed devices with low pull-in voltages is to use extremely small gaps and light weight materials. Therefore cantilevers were made from an aligned composite single wall carbon nanotube membrane was prepared by a dielectrophoretic self-assembly process (AC-SWNT). The process, as detailed in our recent report [3] uses alternating layers of aligned carbon nanotubes and polymer. The fixedbeam switch consists of a gate electrode and a 20 nm thick AC-SWNT membrane suspended between two electrodes.
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U2 - 10.1109/DRC.2009.5354904
DO - 10.1109/DRC.2009.5354904
M3 - Conference contribution
AN - SCOPUS:76549104636
SN - 9781424435289
T3 - Device Research Conference - Conference Digest, DRC
SP - 29
EP - 30
BT - 67th Device Research Conference, DRC 2009
T2 - 67th Device Research Conference, DRC 2009
Y2 - 22 June 2009 through 24 June 2009
ER -