3D piezoelectric microsystems pop up

Ghazaleh Haghiashtiani, Michael C. McAlpine

Research output: Contribution to journalComment/debatepeer-review


The compressive buckling of lithographically defined, two-dimensional patterns can create three-dimensional piezoelectric microsystems with a range of potential applications.

Original languageEnglish (US)
Pages (from-to)15-16
Number of pages2
JournalNature Electronics
Issue number1
StatePublished - Jan 1 2019

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