14.6 A scalable THz 2D phased array with +17dBm of EIRP at 338GHz in 65nm bulk CMOS

There is an untapped market for integrated high-resolution imaging and spectroscopy at mm-Wave and THz frequencies. Some novel approaches have been recently proposed to render on-chip signal generation and transmission at these frequencies [1-4]. However, as the frequency approaches the physical limitations of the device, self-sustained oscillation becomes increasingly difficult and the generated power fades away. Fortunately, the limited power from individual devices can be offset by coherent power-combining of multiple sources. A desirable mechanism to generate high power levels above the f_max, has to provide a solution that first, enables a scalable approach to generate and combine the maximum available power from individual sources and second, ensures controllable phase shift between multiple sources in order to provide beam steering at any desired direction.