12.O.01 Advances in microcontamination research

David Y.H. Pui, Benjamin Y.H. Liu

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)107-108
Number of pages2
JournalJournal of Aerosol Science
Issue numberSUPPL. 1
StatePublished - May 1994

Bibliographical note

Funding Information:
ten years. The research has been supported by a consortium of a total of 14 microelectronics manufacturers and suppliers. Under the support of the consortium, we have graduated approximately 20 Ph.D. and 15 M.S. students, and the majority of these graduates are employed by the electronics industry. This presentation will first briefly highlight some of the major accomplishments of the consortillm. A description of several on-going research projects will then follow, showing how particle science and technology are used to solve the industry's problems.

Copyright 2018 Elsevier B.V., All rights reserved.


  • Clean Manufacturing
  • Clean Processes
  • Cleanroom
  • Microcontamination
  • Process Equipment

Cite this