1986 …2013

Research output per year

If you made any changes in Pure these will be visible here soon.

Research Output

  • 21 Article
  • 6 Conference article
  • 5 Conference contribution
Filter
Conference article
2001
2 Scopus citations
1997

Real-time control of etching processes: Experimental results

Berg, J., Higman, T. K. & Tannenbaum, A. R., Dec 1 1997, In : Proceedings of SPIE - The International Society for Optical Engineering. 3213, p. 249-260 12 p.

Research output: Contribution to journalConference article

1 Scopus citations
1995

Atomic force microscope-based lithography of titanium

Gordon, A. E., Litfin, D. D., Hagedorn, M. S., Chen, J., Fayfield, R. T. & Higman, T. K., Dec 1 1995, In : Materials Research Society Symposium - Proceedings. 380, p. 125-130 6 p.

Research output: Contribution to journalConference article

8 Scopus citations

Ultrathin nitride layers grown by molecular-beam epitaxy and their effects on interface states in silicon metal-insulator-semiconductor field-effect transistors

Fayfield, R. T., Chen, J., Hagedorn, M. S., Higman, T. K., Moy, A. M. & Cheng, K. Y., Mar 1 1995, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 13, 2, p. 786-788 3 p.

Research output: Contribution to journalConference article

1 Scopus citations
1993

Scanning tunneling microscope-based nanolithography for electronic device fabrication

Lyding, J. W., Brockenbrough, R. T., Fay, P. J., Tucker, J. R., Hess, K. & Higman, T. K., Oct 3 1993, In : Proceedings of SPIE - The International Society for Optical Engineering. 10310, p. 111-126 16 p., 1031008.

Research output: Contribution to journalConference article

1 Scopus citations