20002020

Research output per year

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Research Output

  • 29 Article
  • 5 Conference contribution
Filter
Conference contribution
2016

FOUP purge performance improvement using EFEM flow converter

Kim, S. C. & Schelske, G., Jun 13 2016, 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016. Institute of Electrical and Electronics Engineers Inc., p. 6-11 6 p. 7491075. (2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
2014

Advanced FOUP purge using diffusers for FOUP door-off application

Wang, H. P., Kim, S. C. & Liu, B., Jan 1 2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2014. Institute of Electrical and Electronics Engineers Inc., p. 120-124 5 p. 6846999. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations
2008

Characterization of CMP slurries by filtration and other methods

Wang, J., Ling, T. Y., Kim, S. C. & Pui, D. Y., 2008, 21st American Filtration and Separations Society Annual Conference 2008. p. 639-658 20 p. (American Filtration and Separations Society - 21st American Filtration and Separations Society Annual Conference 2008; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2007

Modeling of nanofiber filters

Wang, J., Kim, S. C. & Pui, D. Y., Dec 1 2007, 20th Annual Conference and Exposition of the American Filtration and Separations Society 200. p. 366-389 24 p. (American Filtration and Separations Society - 20th Annual Conference and Exposition of the American Filtration and Separations Society 2007; vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2003

Removal characteristics of yellow sand dusts using plasma air cleaning systems for improving indoor air quality

Lee, J. K., Kim, S. C., Noh, H. S., Hwang, Y. J., Hao, Q., Lee, K. G., Kang, T. W., Lee, W. H. & Ock, J. H., Dec 1 2003, Proceedings of the 2003 - 4th International Symposium on Heating, Ventilating and Airconditioning. Zou, Y. (ed.). p. 346-353 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution