Kevin G Roberts

19992003

Research output per year

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Research Output

  • 1 Article
  • 1 Conference article
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Article
2003

Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films

Toivola, Y., Thurn, J., Cook, R. F., Cibuzar, G. & Roberts, K., Nov 15 2003, In : Journal of Applied Physics. 94, 10, p. 6915-6922 8 p.

Research output: Contribution to journalArticle

56 Scopus citations