Kevin G Roberts

19992003

Research output per year

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Research Output

  • 1 Article
  • 1 Conference article

Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films

Toivola, Y., Thurn, J., Cook, R. F., Cibuzar, G. & Roberts, K., Nov 15 2003, In : Journal of Applied Physics. 94, 10, p. 6915-6922 8 p.

Research output: Contribution to journalArticle

  • 55 Scopus citations

    Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology

    Roberts, K., Williamson, F., Cibuzar, G. & Thomas, L., Jan 1 1999, In : Biennial University/Government/Industry Microelectronics Symposium - Proceedings. p. 139-141 3 p.

    Research output: Contribution to journalConference article

  • 9 Scopus citations