1991 …2019

Research output per year

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Research Output

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Conference article

Atomic-scale analysis of plasma-enhanced chemical vapor deposition from SiH4/H2 plasmas on Si substrates

Ramalingam, S., Maroudas, D. & Aydil, E. S., Jan 1 1999, In : Materials Research Society Symposium - Proceedings. 507, p. 673-678 6 p.

Research output: Contribution to journalConference article

1 Scopus citations

Atomic-scale analysis of the reactivity of radicals from silane/hydrogen plasmas with silicon surfaces

Ramalingam, S., Maroudas, D. & Aydil, E. S., Jan 1 1998, In : Materials Research Society Symposium - Proceedings. 485, p. 107-112 6 p.

Research output: Contribution to journalConference article

3 Scopus citations

Growth and Characterization of ZnO Nanowires

Baxter, J. B., Bessems, R. E. M. W. & Aydil, E. S., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 776, p. 101-106 6 p.

Research output: Contribution to journalConference article

1 Scopus citations
7 Scopus citations

Reaction Control in Amorphous Silicon Film Deposition by Hydrogen Chloride

Takano, A., Wada, T., Fujikake, S., Yoshida, T., Ohto, T. & Aydil, E. S., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 762, p. 521-526 6 p.

Research output: Contribution to journalConference article

Surface processes during growth of hydrogenated amorphous silicon

Aydil, E. S., Agarwal, S., Valipa, M., Sriraman, S. & Maroudas, D., Jan 1 2004, In : Materials Research Society Symposium Proceedings. 808, p. 199-207 9 p.

Research output: Contribution to journalConference article

1 Scopus citations

The role of SiH3 diffusion in determining the surface smoothness of plasma-deposited amorphous Si thin films: An atomic-scale analysis

Valipa, M. S., Bakos, T., Aydil, E. S. & Maroudas, D., Jan 1 2005, In : Materials Research Society Symposium Proceedings. 862, p. 37-42 6 p., A3.2.

Research output: Contribution to journalConference article