Organization profile

Organization profile

The mission of the Nanofabrication Center (NFC), an interdisciplinary facility for faculty and industrial research within the University's College of Science and Engineering, is to support education, research, and industrial development in microelectronics; and other related research involving nanofabrication. This is done by providing access to state-of-the-art micro and nano fabrication equipment in a clean room environment, as well as the technical expertise to use this equipment. The NFC is part of the National Nanotechnology Infrastructure Network (NNIN), an NSF-supported partnership of 13 user facilities nationwide providing Nano Technology Research.

Fingerprint Dive into the research topics where Minnesota Nano Center is active. These topic labels come from the works of this organization's members. Together they form a unique fingerprint.

Electron beam lithography Engineering & Materials Science
lithography Physics & Astronomy
electron beams Physics & Astronomy
Hydrogen Engineering & Materials Science
Lithography Engineering & Materials Science
hydrogen Physics & Astronomy
Scanning Engineering & Materials Science
metrology Physics & Astronomy

Profiles

No photo of Stephen A Campbell

Stephen A Campbell

Person: Faculty, Executive, Administrative, and Managerial

19812020
No photo of Mark A Fisher

Mark A Fisher

Person: Researcher

No photo of Wanjohi Kimani

Wanjohi Kimani

Person: Researcher

Projects 2015 2018

education

Research Output 2000 2011

1 Citation (Scopus)

Miniaturization of grayscale images

Yang, J. K. W., Duan, H., Law, J. B. K., Yee Low, H. & Cord, B., Jan 1 2011, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 6, 06F313.

Research output: Contribution to journalArticle

miniaturization
Lithography
Pixels
lithography
Electron microscopes
33 Citations (Scopus)

Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption

Olynick, D. L., Cord, B., Schipotinin, A., Ogletree, D. F. & Schuck, P. J., Jan 1 2010, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 3, p. 581-587 7 p.

Research output: Contribution to journalArticle

Vibrational spectroscopy
Hydrogen
Electron beams
Desorption
desorption
25 Citations (Scopus)

Metrology for electron-beam lithography and resist contrast at the sub-10 nm scale

Duan, H., Manfrinato, V. R., Yang, J. K. W., Winston, D., Cord, B. & Berggren, K. K., Jan 1 2010, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 6

Research output: Contribution to journalArticle

Electron beam lithography
metrology
lithography
electron beams
Atomic force microscopy