Organization profile

Organization profile

The mission of the Nanofabrication Center (NFC), an interdisciplinary facility for faculty and industrial research within the University's College of Science and Engineering, is to support education, research, and industrial development in microelectronics; and other related research involving nanofabrication. This is done by providing access to state-of-the-art micro and nano fabrication equipment in a clean room environment, as well as the technical expertise to use this equipment. The NFC is part of the National Nanotechnology Infrastructure Network (NNIN), an NSF-supported partnership of 13 user facilities nationwide providing Nano Technology Research.

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  • Profiles

    No photo of Stephen A Campbell

    Stephen A Campbell

    Person: Faculty, Executive, Administrative, and Managerial

    19812020
    No photo of Mark A Fisher

    Mark A Fisher

    Person: Researcher

    20032010
    No photo of Wanjohi Kimani

    Wanjohi Kimani

    Person: Researcher

    Projects

  • Research Output

    Welcome to UGIM 2012!

    Cibuzar, G., Flounders, A. W. & Voros, K., Sep 28 2012, In : Biennial University/Government/Industry Microelectronics Symposium - Proceedings. 6247098.

    Research output: Contribution to journalEditorial

    Miniaturization of grayscale images

    Yang, J. K. W., Duan, H., Law, J. B. K., Yee Low, H. & Cord, B., Nov 2011, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 6, 06F313.

    Research output: Contribution to journalArticle

  • 1 Scopus citations

    Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption

    Olynick, D. L., Cord, B., Schipotinin, A., Ogletree, D. F. & Schuck, P. J., May 2010, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 3, p. 581-587 7 p.

    Research output: Contribution to journalArticle

  • 34 Scopus citations